Carrier for Ultra-Thin Substrates and Method of Use
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United States of America Patent
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Issued Date -
Feb 12, 2015
app pub date -
Aug 7, 2013
filing date -
Aug 7, 2013
priority date (Note) -
Abandoned
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Abstract
A substrate carrier, including: a baffle having a continuous perimeter sidewall surrounding an enclosed region; and one or more standoffs attached to an inside surface of the perimeter sidewall, the one or more standoffs extending into the enclosed region and below a bottom edge of the perimeter sidewall, the one or more standoffs each having a lip located between an upper edge of the baffle and the lower edge of the baffle. Also, a method of annealing substrates using the substrate carrier.
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