LASER SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
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United States of America Patent
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app pub date -
Oct 24, 2014
filing date -
Apr 27, 2012
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Abandoned
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Abstract
The laser system may include: a clock generator; a mode-locked laser device having an optical resonator; a controlling device capable of controlling resonator length of the optical resonator; a detector disposed in an optical path of the pulse laser beam, configured to detect the pulse laser beam and output a detection signal; a switching device disposed in the optical path of the pulse laser beam, capable of switching the pulse laser beam; and a controller, capable of controlling the controlling device based on the clock signal outputted by the clock generator and on the detection signal outputted by the detector, and capable of controlling the switching device based on the clock signal outputted by the clock generator and on a timing signal outputted by an external device.
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