DEVICE FOR DETECTING QUALITY LEVEL OF MICROELECTRONIC PACKAGING SAMPLES USING PHOTO-THERMAL IMAGING
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United States of America Patent
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app pub date -
Oct 24, 2014
filing date -
Sep 28, 2012
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Abandoned
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Abstract
An image acquisition device based on photo-thermal imaging, including a support beam, a translational electric motor, an imaging probe, and a light emitter. The translational electric motor is fixed to the lower side of the beam, and the imaging probe is perpendicularly fixed to a moving block in the translational electric motor. The light emitter is connected to the moving block via an adjustable connection piece, and by adjusting the adjustable connection piece, light emitted by the light emitter enters the imaging probe after being reflected by a sample. The moving block in the translational electric motor is configured to move the light emitter and the imaging probe in the radial direction right above the sample. The light emitter is configured to emit light on the upper surface of the sample. The imaging probe is configured to image reflected light from the upper surface of the sample.
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