DISPERSION PLATE FOR CHEMICAL VAPOR DEPOSITION PROCESSES TO FORM DOPED FILMS
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United States of America Patent
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Issued Date -
Feb 5, 2015
app pub date -
Jul 31, 2013
filing date -
Jul 31, 2013
priority date (Note) -
Abandoned
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Abstract
An apparatus comprising a dispersion plate, a dispersion plate, the dispersion plate including input side openings connected to holes therein, the holes following a torturous path through the dispersion plate and configured to deliver dopants through output side openings of the dispersion plate.
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