LIFETIME ION SOURCE
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United States of America Patent
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Issued Date -
Feb 5, 2015
app pub date -
Aug 1, 2013
filing date -
Aug 1, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An ion source includes an ion source chamber, a gas source to provide a fluorine-containing gas species to the ion source chamber and a cathode disposed in the ion source chamber configured to emit electrons to generate a plasma within the ion source chamber. The ion source chamber and cathode are comprised of a refractory metal. A phosphide insert is disposed within the ion source chamber and presents an exposed surface area that is configured to generate gas phase phosphorous species when the plasma is present in the ion source chamber, wherein the phosphide component is one of boron phosphide, tungsten phosphide, aluminum phosphide, nickel phosphide, calcium phosphide and indium phosphide.
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