FASTENING MEMBER AND VACUUM DEVICE
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United States of America Patent
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app pub date -
Sep 10, 2014
filing date -
Mar 14, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention provides a fastening member which involves only a low risk of contamination even after repeatedly performing a detachment operation, and to provide a vacuum device including it. One embodiment is a fastening member comprising: a head section including a head-upper-face portion, a seating face portion, and a head-side-face portion; and a shaft section and including a threaded portion on an end portion thereof on the opposite side from the head section, wherein the threaded portion is given hardness higher than at least those of the other portions of the fastening member, and when the member is attached to the inner wall of the chamber with the fastening member, the threaded portion is threadedly engaged with an internally threaded portion provided in the inner wall of the chamber, and the sealing face portion presses the member against the inner wall of the chamber.
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