PHYSICAL QUANTITY DETECTOR

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United States of America Patent

APP PUB NO 20150033859A1
SERIAL NO

14448108

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A physical quantity detector includes a first displacement detector configured by a pair of capacitors, which are configured by first movable electrodes formed on a pendulum, and a pair of first fixed electrodes; a second displacement detector provided below the first displacement detector, and configured by a pair of capacitors, which are configured by second movable electrodes formed on the pendulum, and a pair of second fixed electrodes; a first detection circuit detecting a difference between capacitance values of each of the pair of capacitors of the first displacement detector; a second detection circuit detecting the difference between the capacitance values of each of the pair of capacitors of the second displacement detector; and an instrumentation amplifier calculating a difference between the differences in the capacitance values detected by the first detection circuit and the second detection circuit.

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Patent Owner(s)

Patent OwnerAddress
MITUTOYO CORPORATION20-1 SAKADO 1-CHOME TAKATSU-KU KAWASAKI-SHI KANAGAWA 213-8533

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
SHIRASAWA, Shogo Kanagawa, JP 1 0

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