COATED ARTICLE AND CHEMICAL VAPOR DEPOSITION PROCESS
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United States of America Patent
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Jan 29, 2015
app pub date -
Jul 25, 2014
filing date -
Jul 29, 2013
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Abstract
A chemical vapor deposition process and article formed by a chemical vapor deposition process are disclosed. The process includes pretreating a substrate by exposing the substrate to an oxidative environment for a period of time, decomposing a material to form a layer on the substrate, and functionalizing one or both of the layer and the substrate. The pretreating pre-oxidizes the substrate.
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