TRICHLOROSILANE PRODUCTION
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United States of America Patent
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Issued Date -
Jan 29, 2015
app pub date -
Mar 13, 2013
filing date -
Mar 14, 2012
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Abstract
A process that includes combining hydrogen chloride, metallurgical grade silicon and a third gas, e.g., tetrachlorosilane, in a reactor, under reaction conditions that include a temperature of 250-400 C. and a pressure of 2-33 barg, for a time sufficient to convert metallurgical grade silicon to an exit gas that includes trichlorosilane.
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