Variable Density Scanning
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United States of America Patent
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Issued Date -
Jan 22, 2015
app pub date -
Jul 16, 2013
filing date -
Jul 16, 2013
priority date (Note) -
Abandoned
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Abstract
Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
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