RADIATION IMAGE PICKUP UNIT AND RADIATION IMAGE PICKUP DISPLAY SYSTEM
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United States of America Patent
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Jan 22, 2015
app pub date -
Jul 1, 2014
filing date -
Jul 16, 2013
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Abstract
A radiation image pickup unit includes: a plurality of pixels each configured to generate a signal charge based on a radiation; and a field effect transistor to readout the signal charges from the plurality of pixels. The transistor includes a semiconductor layer including an active layer, a first gate electrode disposed to face the semiconductor layer, a first gate insulating film provided between the semiconductor layer and the first gate electrode, and including a first silicon oxide film, a source electrode and a drain electrode that are electrically connected to the semiconductor layer, and a second silicon oxide film provided in a layer different from the first gate insulating film. The first silicon oxide film of the first gate insulating film is a porous film lower in film density than the second silicon oxide film.
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