PIEZOELECTRIC DEVICE AND METHOD FOR FABRICATING THE SAME
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United States of America Patent
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Issued Date -
Jan 15, 2015
app pub date -
Jul 4, 2014
filing date -
Jul 9, 2013
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Abstract
A piezoelectric device includes a piezoelectric vibrating piece, a base, a first lid, and a second lid. The piezoelectric vibrating piece includes an electrode. The base holds the piezoelectric vibrating piece. The first lid is bonded to the base. The first lid houses the piezoelectric vibrating piece in a cavity. The first lid has an opening portion that opens the cavity. The second lid is bonded to a front surface of the first lid so as to cover the opening portion. The opening portion is fabricated at a position overlapping a portion including a region of the piezoelectric vibrating piece excluding the electrode, or a portion including a region excluding the piezoelectric vibrating piece in plan view.
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