IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Jan 15, 2015
app pub date -
Nov 29, 2012
filing date -
Feb 29, 2012
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Abstract
Provided are an image sensor and a method of manufacturing the same. The image sensor includes a support substrate, a wire layer disposed under the support substrate, an epitaxial layer disposed under the wire layer, and a photodiode disposed in the epitaxial layer. The epitaxial layer has an off angle of about 0.3° to about 1.5° with respect to a [001] crystal orientation.
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