OXIDE SINTERED COMPACT AND SPUTTERING TARGET, AS WELL AS ITS PRODUCTION PROCESSES
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United States of America Patent
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Jan 15, 2015
app pub date -
Mar 19, 2013
filing date -
Mar 21, 2012
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Abstract
The Li-containing transition metal oxide sintered compact of the present invention includes Li and a transition metal, and further includes Al, Si, Zr, Ca, and Y as impurity elements, of which contents are controlled to the following ranges: Al≦90 ppm; Si≦100 ppm; Zr≦100 ppm; Ca≦80 ppm; and Y≦20 ppm, wherein the sintered compact has a relative density of 95% or higher and a specific resistance of lower than 2×107 Ωcm. The present invention makes it possible to stably form Li-containing transition metal oxide thin films useful as the positive electrode thin films of secondary batteries or the like at a high deposition rate without causing abnormal discharge.
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