MEMBRANE VACUUM PUMP
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United States of America Patent
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Issued Date -
Jan 8, 2015
app pub date -
Jul 1, 2014
filing date -
Jul 5, 2013
priority date (Note) -
Abandoned
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Abstract
A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.
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