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Abstract

Low-coherence scanning systems and methods for operating the same include simultaneously measuring two phase-shifted interferograms corresponding to intensity patterns produced by interfering test light reflected from a test object with reference light on respective first and second detectors, in which the test light and reference light are derived from a common source. The interferograms measured by the first detector define a first set of scanning interferometry signals, and the interferograms measured by the second detector define a second set of interferometry signals corresponding to substantially the same multiple transverse locations on the test object, in which each interferometry signal in the second set is phase-shifted relative to a corresponding interferometry signal in the first set. An electronic processor processes the first set and second set of interferometry signals either independently from each other or in a combined manner to obtain information about the test object.

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