VACUUM DEPOSITION SOURCE HEATING SYSTEM AND VACUUM DEPOSITION SYSTEM
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United States of America Patent
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Jan 1, 2015
app pub date -
Mar 6, 2013
filing date -
Mar 15, 2012
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Abstract
The invention relates to a vacuum deposition source heating system and to a vacuum deposition system having such a heating system. The vacuum deposition source heating system is mountable to a vacuum deposition system and comprises: a heating element (1) designed for heating a deposition source, a power supply element (2), electrically connected to the heating element for providing electrical power to the heating element (1); a connection member (3), electrically connecting the power supply element (2) to the heating element, whereby the power supply element is mechanically mounted to the connection member (3) in an elastic manner, and whereby the connection member comprises a spring element (31) made of an elastic carbon material.
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