HEATING APPARATUS AND HEATING METHOD
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United States of America Patent
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Issued Date -
Dec 18, 2014
app pub date -
Jun 18, 2013
filing date -
Jun 18, 2013
priority date (Note) -
Abandoned
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Abstract
A heating apparatus including: a heating part which heats a substrate having coated thereon a liquid material containing a metal and a solvent, and a thermocouple which is disposed to contact a portion of the heating part and has at least a surface of a contact portion contacting the heating part covered with a protection film.
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