Micro-electro-mechanical system (MEMS) structure and design structures
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United States of America Patent
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Nov 15, 2016
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Dec 18, 2014
app pub date -
Jun 18, 2013
filing date -
Jun 18, 2013
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Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.
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