METHOD OF PREPARING YTTRIA SOLUTION FOR BUFFER LAYER OF SUBSTRATE
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United States of America Patent
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Issued Date -
Dec 11, 2014
app pub date -
Jun 11, 2013
filing date -
Jun 11, 2013
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Abstract
Disclosed herein is a method of preparing a yttria solution for a buffer layer of a substrate, including the steps of: (a) mixing yttrium acetate tetrahydrate with methanol to form a mixture and then stirring the mixture; (b) injecting diethanolamine as a chelating agent into the mixture of the step (a) and then stirring the mixture to synthesize a composite; and (c) filtering the composite synthesized in the step (b) using a filter to obtain a sol. The method is advantageous in that the yttria solution prepared in this method is applied onto a substrate to flatten the substrate, and is used to form a diffusion barrier serving as a buffer layer for preventing the diffusion of a substrate material.
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