THERMAL CONVECTION TYPE LINEAR ACCELEROMETER
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United States of America Patent
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Issued Date -
Dec 11, 2014
app pub date -
Jun 11, 2014
filing date -
Jun 11, 2013
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Abstract
A thermal convection type linear accelerometer includes a substrate and a first sensing device. The first sensing device includes two first temperature-sensing components and a first heater. The two first temperature-sensing components are disposed on the substrate. The first heater is disposed on the substrate. The first heater is located between the two first temperature-sensing components. The two first temperature-sensing components are higher than the first heater relative to the substrate.
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