YIELD ANALYSIS SYSTEM AND METHOD USING SENSOR DATA OF FABRICATION EQUIPMENT
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United States of America Patent
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Issued Date -
Dec 4, 2014
app pub date -
Aug 28, 2013
filing date -
May 31, 2013
priority date (Note) -
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Abstract
A system and method for analyzing a product fabrication process are disclosed. A product yield analysis system according to an exemplary embodiment of the present disclosure includes a data extraction unit that extracts sensor data from a plurality of sensors arranged in equipment for fabricating a product, a reference signal generation unit that generates a reference signal for each of the plurality of sensors from the sensor data, and a sensor detection unit that detects one or more sensors having a correlation with a yield of the product using the sensor data and the reference signal.
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