METHODS OF CRYSTALLISING THIN FILMS

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United States of America Patent

APP PUB NO 20140357066A1
SERIAL NO

14343810

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of crystallising a thin film (220) including the steps of: depositing a thin film (220) on a substrate (210; and exposing the thin film (220) as deposited on the substrate (210) and the substrate (210) to a plasma for a time period of greater than 5 minutes, wherein: the thin film (220) is one of an amorphous magneto optic material, an amorphous electro optic material or a nitride material; a gas (130) is excited with a radio frequency (RF) field to form the plasma; the thin film (220) and the substrate (210) are, in the course of being exposed to the plasma, heated to temperatures of between 400° C. and 550° C. by the plasma; and the thin film (220) is at least partially crystallised by the plasma.

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Patent Owner(s)

Patent OwnerAddress
PANORAMA SYNERGY LTDSUITE 2 17 FOLEY STREET BALCATTA WA 6021

International Classification(s)

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  • 2012 Application Filing Year
  • H01L Class
  • 20465 Applications Filed
  • 18077 Patents Issued To-Date
  • 88.34 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20122013201420152016201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jeffery, Roger Dunstan Brisbane, AU 2 1

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  • 1 Citation Count
  • H01L Class
  • 7.09 % this patent is cited more than
  • 11 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges7625916189582342423416712683684320001 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0500100015002000250030003500400045005000550060006500

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