LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
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United States of America Patent
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app pub date -
Aug 8, 2014
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Mar 30, 2012
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Abstract
A laser apparatus may include a master oscillator configured to output a pulse laser beam, at least one amplifier provided in a path of the pulse laser beam from the master oscillator, and at least one first optical isolator provided in the path of the pulse laser beam, the first optical isolator including at least one of a GaAs crystal and a CdTe crystal as an electro-optic crystal.
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