LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
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United States of America Patent
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Issued Date -
Nov 27, 2014
app pub date -
Aug 8, 2014
filing date -
Mar 29, 2012
priority date (Note) -
Abandoned
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Abstract
A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier disposed in an optical path of the pulse laser beam, an energy detector that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator.
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