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Abstract

A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (I) on which a plurality of masses (2, 3) oscillating tangentially about the z axis, which is perpendicular to the substrate (I), are arranged. The oscillating masses (2, 3) are fastened on the substrate (I) by means of springs (5, 6, 8) and tie bolts (7, 9). Driving elements (II) serve to maintain oscillating, tangential vibrations of the masses (2, 3) about the z axis, as a result of which, upon rotation of the substrate (I) about any spatial axis, the masses (2, 3) are subjected to Corolis forces and deflections caused as a result. Sensor elements detect the deflections of the masses (2, 3) on the basis of the Corolis forces generated. Some of the masses (2, 3) oscillating about the z axis are mounted in a tiltable manner substantially about the x axis which runs parallel to the substrate (I). Others of the masses (2, 3) oscillating about the z axis are mountable in a tiltable manner substantially about the y axis, which likewise runs parallel to the substrate (I). At least one other of the oscillating masses (2, 3) can be additionally at least partially deflected substantially radially to the z axis in the x-y plane parallel to the plane of the substrate (I). Said additionally radially deflectable z mass (3) is assigned a sensor element (12) which can likewise be deflected radially with respect to the z axis but does not oscillate about the z axis.

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