DUAL-SIDE WAFER BAR GRINDING

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United States of America Patent

APP PUB NO 20140341796A1
SERIAL NO

13897701

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Abstract

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A dual-side wafer bar grinding method and apparatus is disclosed herein that slices wafer bars from a wafer block for use in manufacturing thin film magnetic heads, for example. By grinding opposing faces of the wafer bars sliced from the wafer block, variations in flatness, perpendicularity, surface finish, and/or overall dimensions are improved.

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INC1 TERMINAL DRIVE PLAINVIEW NY 11803

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chua, Senghong Oxnard, US 1 0
Daof, Serapion C Moorpark, US 1 0
Lee, Meng Newbury Park, US 2 12
Wang, Jianmin Camarillo, US 120 751

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