DETECTION APPARATUS AND METHOD OF CHEMICAL MECHANICAL POLISHING CONDITIONER
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United States of America Patent
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Issued Date -
Nov 13, 2014
app pub date -
Apr 15, 2014
filing date -
May 9, 2013
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a detection apparatus of chemical mechanical polishing conditioner, comprising: a working platform with a working plane; a placement base disposed on the working plane of the working platform, for carrying a chemical mechanical polishing conditioner; an image capture device forming one or a plurality of captured images on different regions of the chemical mechanical polishing conditioner; a display device; an image recognition module, wherein the captured images are performed a color matching by the image recognition module to determine one or a plurality of risk diamonds on the chemical mechanical polishing conditioner, and the coordinate location of the risk diamonds are outputted into the display device; and a mobile platform for moving the risk diamonds to specified locations. A detection method of the above mentioned detection apparatus is also disclosed.
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