Electromechanical transducer
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United States of America Patent
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Nov 10, 2015
Grant Date -
Nov 13, 2014
app pub date -
Jul 29, 2014
filing date -
Apr 10, 2009
priority date (Note) -
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Abstract
When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element.
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