COMPONENT QUANTITATIVE ANALYZING METHOD DEPENDING ON DEPTH OF CIGS FILM USING LASER INDUCED BREAKDOWN SPECTROSCOPY
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United States of America Patent
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Issued Date -
Nov 6, 2014
app pub date -
Dec 30, 2013
filing date -
May 2, 2013
priority date (Note) -
Abandoned
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Abstract
Disclosed herein is a component quantitative analyzing method depending on a depth of a CIGS film, the method including: generating plasma by irradiating a laser beam on the CIGS film and obtaining spectra generated from the plasma, selecting spectral lines having similar characteristics among spectra of specific elements of the CIGS film, and measuring component composition using a value obtained by summing intensities of the selected spectral lines.
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