SYSTEM AND METHOD FOR MAINTAINING OPTICS IN FOCUS
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United States of America Patent
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Issued Date -
Nov 6, 2014
app pub date -
May 4, 2014
filing date -
May 6, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
According to an embodiment of the invention there is provided a system that may include a pivot chuck that may include : a lower chuck portion; an upper chuck portion; a first distance changing module that may include a pivot mechanism and an angle changing element; wherein the pivot mechanism pivotally couples the lower chuck portion to the upper chuck portion; wherein the angle changing element is coupled between the upper and lower chuck portions; wherein the upper chuck portion may be arranged to support a substrate; wherein the angle changing element may be arranged to induce a rotation of the upper chuck portion in relation to the pivot mechanism in response to first focus correction signals.
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