APPARATUS AND METHOD FOR PLASMA TREATMENT OF SURFACES

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United States of America Patent

SERIAL NO

14333217

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Abstract

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A method and a device for the plasma treatment of surfaces of at least one workpiece. At least one plasma source is connected to an energy source in order to generate a plasma. A closed area is in fluid connection to the at least one plasma source. At least one suction unit is used to adjust a pressure difference between the at least one plasma source and the closed area.

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Patent Owner(s)

Patent OwnerAddress
MASCHINENFABRIK REINHAUSEN GMBHFALKENSTEINSTRASSE 8 REGENSBURG D-93059

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Forster, Klaus Bad Abbach, DE 9 45
Korzec, Dariusz Wenzenbach, DE 12 98
Nettesheim, Stefan Berlin, DE 41 214

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  • 5 Citation Count
  • H01J Class
  • 10.83 % this patent is cited more than
  • 11 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1609132178244181453251401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0501001502002503003504004505005506006507007508008509009501000

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