METAL-ORGANIC VAPOR PHASE EPITAXY SYSTEM AND PROCESS
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United States of America Patent
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Issued Date -
Nov 6, 2014
app pub date -
Jul 16, 2014
filing date -
Apr 7, 2011
priority date (Note) -
Abandoned
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Abstract
A VPE reactor is improved by providing temperature control to within 0.5° C., and greater process gas uniformity via novel reactor shaping, unique wafer motion structures, improvements in thermal control systems, improvements in gas flow structures, improved methods for application of gas and temperature, and improved control systems for detecting and reducing process variation.
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