Importance

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Abstract

The present invention relates to a coating system comprising a layer of carbon nanotubes aligned parallel to another, and a directly linked surface layer with metallic properties, from which said carbon nanotubes are grown in “tip” growth. The coating system may further comprise a base layer and/or a substrate. It can be obtained by producing a structured layer from a first phase, consisting of a metal having no independent catalytic activity in terms of the emergence of CNTs from the gas phase, and a second phase consisting of a metal, which catalyzes the emergence of CNTs from the gas phase, on a substrate or a base layer, wherein the first phase has an uneven thickness and/or folded structure potentially interspersed with pores, and the second phase is located in depressions and/or pores of the initial phase in such a way that both material phases are present at least partially next to each other in the lateral plane on said substrate or said base layer located thereon. Carbon is removed from a hydrocarbon gas atmosphere on this structured layer, wherein carbon nanotubes form, which raise at least parts of the structured layer in closed form. The substrate or base layer may then be removed. The coating system of the invention is suitable for use in a variety of components and electronic micro and nanosystems, flip chip connections, sensors and actuators, particularly pressure sensors, touch sensors, optical sensors, reflectors, projectors, optical filters, nanopositioning systems or interferometers in a specific form in a supercapacitor.

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First Claim