PATTERNING OF NON-CONVEX SHAPED NANOSTRUCTURES
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United States of America Patent
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Apr 8, 2014
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Nov 5, 2010
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Abstract
Methods of making nano-scale structures with geometric cross-sections, including convex or non-convex cross-sections, are described. The approach may be used to directly pattern substrates and/or create imprint lithography templates or molds that may be subsequently used to directly replicate nano-shaped patterns into other substrates, such as into a functional or sacrificial resist to form functional nanoparticles.
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