SOLAR CELL MANUFACTURING METHOD AND SOLAR CELL

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United States of America Patent

APP PUB NO 20140318608A1
SERIAL NO

14360732

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Abstract

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A method of manufacturing a solar cell includes a first center alignment step S10 of setting a substrate center position as a reference position for processing of an impurity implanting step S20 and a second center alignment step S30 of setting a substrate center position as a reference position for processing of an electrode forming step S40.

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Patent Owner(s)

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ULVAC INCKANAGAWA JAPAN KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sakata, Genji Chigasaki-shi, JP 4 5
Suzuki, Hideo Chigasaki-shi, JP 375 5761
Tomita, Makoto Chigasaki-shi, JP 60 742
Yokoo, Hidekazu Chigasaki-shi, JP 5 12

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