ROTATING-ELEMENT ELLIPSOMETER AND METHOD FOR MEASURING PROPERTIES OF THE SAMPLE USING THE SAME
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app pub date -
Jul 3, 2014
filing date -
Aug 17, 2011
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Abandoned
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Abstract
Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, and the like, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample. The real-time spectroscopic ellipsometer according to the exemplary embodiment of the present invention have the improved structure and function to solve problems such as polarization dependency of a light source and a photometric detector, wavelength dependency of a compensator, a limitation of a change in integration time due to a fixing of a measuring frequency of exposure, in a rotating-element multichannel spectroscopic ellipsometers of the related art, thereby measuring more accurately, precisely, and rapidly measuring the characteristics of the sample than the related art.
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