Defect inspection apparatus and method using a plurality of detectors to generate a subtracted image that may be used to form a subtraction profile
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United States of America Patent
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Jan 12, 2016
Grant Date -
Oct 23, 2014
app pub date -
Apr 16, 2014
filing date -
Apr 17, 2013
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Abstract
There is provided a defect inspection apparatus including: an electron scanning unit configured to scan a surface of a sample with an electron beam; a plurality of detectors arranged around an optical axis of the electron beam and configured to detect electrons emitted from the surface of the sample by scanning the electron beam; a signal processing unit configured to generate image data of the surface of the sample based on detection signals from the detectors; an analysis unit configured to detect a defect due to irregularities of the surface of the sample based on the image data; and a control unit configured to control a scanning speed of the electron beam depending on the type of the sample.
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