Solar Cell With Selectively Doped Conductive Oxide Layer And Method Of Making The Same
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United States of America Patent
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Mar 7, 2014
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Mar 12, 2013
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Abstract
A method of making a coated substrate having a transparent conductive oxide layer with a dopant selectively distributed in the layer includes selectively supplying an oxide precursor material and a dopant precursor material to each coating cell of a multi-cell chemical vapor deposition coater, wherein the amount of dopant material supplied is selected to vary the dopant content versus coating depth in the resultant coating.
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