SEMICONDUCTOR DEVICE WITH A POLYMER SUBSTRATE AND METHODS OF MANUFACTURING THE SAME

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United States of America Patent

SERIAL NO

14315765

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Abstract

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A semiconductor device and methods for manufacturing the same are disclosed. The semiconductor device includes a semiconductor stack structure having a first surface and a second surface. A polymer substrate having a high thermal conductivity and a high electrical resistivity is disposed onto the first surface of the semiconductor stack structure. One method includes providing the semiconductor stack structure with the first surface in direct contact with a wafer handle. A next step involves removing the wafer handle to expose the first surface of the semiconductor stack structure. A following step includes disposing a polymer substrate having high thermal conductivity and high electrical resistivity directly onto the first surface of the semiconductor stack structure.

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Patent Owner(s)

Patent OwnerAddress
RF MICRO DEVICES INC7628 THORNDIKE ROAD GREENSBORO NC 27409

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carroll, Michael Jamestown, US 70 3169
Costa, Julio Oak Ridge, US 42 1630
Glass, Elizabeth Oak Ridge, US 5 1054
Kerr, Daniel Charles Oak Ridge, US 56 2316
Willis, Don Kernersville, US 9 1065

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