Passivation of nonlinear optical crystals

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United States of America Patent

PATENT NO 11180866
APP PUB NO 20140305367A1
SERIAL NO

14248045

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Abstract

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The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chuang, Yung-Ho Alex Cupertino, US 86 940
Dribinski, Vladimir Scotts Valley, US 31 626

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