Importance

Loading Importance Indicators...

Abstract

The invention is directed to providing a dry etching agent having little effect on the global environment but having the required performance. Provided is a dry etching agent containing, each at a specific vol %: (A) a fluorine-containing unsaturated hydrocarbon represented by the formula C_aF_bH_c (in the formula, a, b and c are each positive integers and satisfy the correlations of 2≦a≦5, cb+c and b≦a+c, excluding the case where a=3, b=4 or c=2); (B) at least one kind of gas selected from the group consisting of O₂, O₃, CO, CO₂, COCl₂, COF₂, F₂, NF₃, Cl₂, Br₂, I₂, and YF_n (where Y is Cl, Br or I and n is an integer of 1 to 5); and (C) at least one kind of gas selected from the group consisting of N₂, He, Ar, Ne, Xe, and Kr.

First Claim