MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE
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United States of America Patent
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app pub date -
Apr 11, 2012
filing date -
Nov 2, 2011
priority date (Note) -
Abandoned
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Abstract
Provided is a member for semiconductor manufacturing device which hardly causes component contamination and is capable of sufficiently reducing generation of particles in a semiconductor manufacturing device. A spray coating is formed by spraying a ceramic onto a mounting member of a transfer arm, and laser beam is irradiated to the spray coating to remelt and resolidify the ceramic composition for modification to thereby form a high-strength ceramic layer made from a ceramic recrystallized material and having a net-like crack, whereby particles dropped out from the mounting member due to external factors in a semiconductor manufacturing device are reduced to an extent not affecting a semiconductor manufacturing process.
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