MICRO SYNTHETIC JET EJECTOR
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United States of America Patent
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Issued Date -
Oct 9, 2014
app pub date -
Mar 7, 2014
filing date -
Apr 8, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A semiconductor device is provided which functions as a synthetic jet ejector. The semiconductor device (201) includes a first layer (203), a third layer (207), and a second layer (205) disposed between the first layer and the third layer, wherein the second layer includes a MEMS comb drive (221). The device has a plurality of apertures therein (209, 211, 213, 215 and 217) which are in fluidic communication with the comb drive and which are also in fluidic communication with the external environment. The comb drive operates to generate a plurality of synthetic jets at the plurality of apertures.
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