SCANNING PROBE MICROSCOPE
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United States of America Patent
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app pub date -
Jun 13, 2014
filing date -
Dec 19, 2007
priority date (Note) -
Abandoned
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Abstract
A scanning probe microscope is provided for scanning a sample surface with a probe formed on a cantilever and detecting an interaction acting between the probe and the sample surface to measure a physical property including a surface shape of the sample. The microscope includes an arrangement for detecting torsion of the cantilever and for correcting a profile error caused by deflection of the probe and torsion of the cantilever based on the amount of torsion which is detected.
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