COMBUSTION DEPOSITION SYSTEMS AND METHODS OF USE
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United States of America Patent
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app pub date -
Mar 12, 2014
filing date -
Mar 26, 2013
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Abstract
Combustion deposition systems and methods of using combustion deposition systems are disclosed. In an embodiment, a combustion deposition system may include a burner that is in fluid communication with at least one supply of at least one precursor such that the at least one precursor can be introduced to a flame output from the burner, at least one electrode positioned at least proximate to the flame, and a voltage source operably coupled to the at least one electrode. The at least one electrode and the at least one voltage source may be configured to generate an electric field for influencing at least one of flame shape, flame temperature, or kinetics of chemical reactions occurring within the flame, thereby providing enhanced selective control of combustion deposition characteristics. For example, the combustion deposition systems disclosed herein may, for example, be configured to control deposition of a combustion-deposited film on a substrate.
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