VACUUM PROCESSING APPARATUS
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United States of America Patent
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app pub date -
Jun 13, 2014
filing date -
Dec 28, 2011
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Abandoned
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Abstract
A vacuum processing apparatus includes a substrate holder which can tilt relative to a target and includes a refrigerating machine which cools a substrate, hoses which transport a refrigerant between a compressor provided outside a vacuum vessel and a cooling device inside the substrate holder, and a housing unit which is provided outside the vacuum vessel and houses the hoses in a coiled state with a curvature radius that does not exceed a predetermined curvature radius.
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