PLASMA DEPOSITION ON A PARTIALLY FABRICATED BATTERY CELL THROUGH A MESH SCREEN
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United States of America Patent
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app pub date -
Jun 13, 2014
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Sep 26, 2012
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Abstract
A plasma chamber for depositing a battery component material on a partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface. The chamber comprises a support carrier to hold a battery support comprising the partially fabricated battery cell. A mesh screen is positioned at a preset distance from the support carrier, the mesh screen having a plurality of mesh openings. An exhaust maintains a pressure of the process gas in the plasma chamber. A plasma power source is capable of applying an electrical power to the process gas to generate a plasma from the process gas for plasma deposition, during which the mesh screen is capable of reducing migration of the charge-carrying metal species across the battery component layer.
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