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Abstract

A method for fabricating a vibrator with a vibrating plate and an electrode for vibrating the vibrating plate includes laminating, forming, filling-in, patterning, subsequently laminating, and subsequently etching. The forming forms a through hole that passes through a conductive film and a second sacrifice film and reaches at least a middle portion in a film thickness direction of a first sacrifice film. The filling-in fills in an auxiliary film for adjusting temperature characteristics including silicon and oxygen from a lower end position to an upper end position of the through hole. The subsequently etching etchs an upper end portion of the auxiliary film, a lower end portion of the auxiliary film, the first sacrifice film, the second sacrifice film, and a third sacrifice film, while leaving the auxiliary film inside the through hole on the vibrating plate, with a use of an etching fluid including hydrogen fluoride.

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First Claim