Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads

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United States of America Patent

PATENT NO 10722997
APP PUB NO 20140287663A1
SERIAL NO

14297177

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Abstract

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A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.

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Patent Owner(s)

Patent OwnerAddress
THOMAS WEST INC470 MERCURY DRIVE SUNNYVALE CA 94085

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Craik, Jorge San Jose, US 1 6
Galvez, Pepito San Jose, US 3 16
Holani, Koli Sunnyvale, US 2 4
McKeever, Peter Redwood City, US 9 51
Nguyen, Long San Jose, US 74 1586
Quigley, Gary Loomis, US 4 32
Richardson, Matt Milpitas, US 3 11
Song, Kevin San Jose, US 15 251
West, Thomas Portola Valley, US 14 155

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